Nanostructuring & Patterning

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Analyze your sample through a wide range of different detectors. Different detectors allow you to receive various types of information about the surface, composition and other details which will help you to improve and ease your processes.

Find the most suitable detectors for your needs:

• Get a recommendation which detector suits your application
• Easy application guide
• Detector specific information
• Learn more about available functionality
• Interactive tool to learn more about ZEISS detectors

Add transmitted electron imaging capability to your FE-SEM or Crossbeam system. Get additional information out of your ultrathin biological or solid-state specimens without need to use a dedicated Transmission Electron Microscope and enjoy flexibility and versatility.

Increase productivity and improve image quality of your FE-SEM by retrofitting the new angle selective Backscatter (AsB) Detector. Benefit from high speed and increased sensitivity due to improved detector and electronics design.

The aBSD detector is used to detect backscattered electrons that have been scattered under very low angles. It provides a great variety of contrast information through the detector’s six input channels.

The Energy selective Backscattered (EsB) Detector is suitable for clear compositional contrast. It is an annular shaped in-column detector that is located above the In-lens detector. The ability to detect BSE makes sub-surface information and nano-scale composition visible.

The BSD4 detector is used to detect backscattered electrons that have been scattered under very low angles. The COMPO-Mode is suitable to produce high quality material contrast, meaning heavy materials are displayed brighter than lightweight materials.

Rapid imaging with the desired resolution requires high electron doses and acceleration voltages, which can cause charging effects and sample damage that compromise image quality. ZEISS Sense BSD combines high-resolution ultrastructural imaging with a new degree of efficiency and image quality, making TEM-like imaging possible with your SEM.

• Well suited for non-conductive, charge-prone biological samples
• Best sample protection and avoids image degradation
• Produces high-quality images in less time

RISE (Raman Imaging and Scanning Electron Microscope) offers you a chemical and structural fingerprint of your sample: Recognize molecular and crystallographic information and perform 3D analysis of the sample.

The BSD-Detector is used to detect backscattered electrons, that have been scattered under very low angles. The new amplifier provides higher detector efficiencies and delivers a variety of contrast information, much higher gain and a lower noise level.

The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.

The fourth generation Variable Pressure SE detector (VPSE G4) convinces with its improved collection signal and thereby a faster response time. Higher scan speeds enable you an increasement of productivity. VPSE G4 provides 20% more contrast up to 400 Pa pressure (at 20 keV).

If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.

• Optimized for routine microanalysis applications
  
• Workflow-guided graphical user interface
  
• Total ZEISS service and system support

The Atomic Force Microscope adds calibrated, atomic-level, 3D resolution and high resolution measurements to the existing SEM functionalities.

ZEISS Atlas 5 makes your life easier: create comprehensive multiscale, multi-modal images with a sample-centric correlative environment.

The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.

SmartSEM is an operating system for electron microscopes that provides access to advanced microscope settings, designed to solve even the most challenging tasks.

Your interactive guide for software news, upgrades and additional functionality. Learn more about ZEISS software, workstations and compatibility, new software functionalities and recent software releases.

• Interactive tool to learn more about ZEN
• Easy software upgrade guide
• Additional information about ZEN core

Add new and improve existing functionality through our broad range of licenses which will help you to improve your processes, ease the use of your system and have tools to receive more information.

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional software package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of the aBSD or the AsB detector.

• Gain automatic measurements and documentation in compliance with ISO 25178, DIN and ASME and other standards
• Create completely traceable metrological reports
• Characterize surfaces and profiles including parameters such as step height, distance, nanometer scaled contour, roughness and waviness, particle and grain size

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools..

The airlock allows efficient loading of samples without breaking the existing vacuum and thus reducing the risk of contamination of the sample chamber. By using this method sample exchange time is also significantly reduced.

The Charge Compensation system offers localized discharging of non-conductive specimens by ionization of nitrogen. High resolution combined with an additional expansion of analytical capabilities are, with the integration of a Charge Compensation system, not restricted to conductive samples only but can also be executed for all kinds of non-conductive samples.

ZEISS offers you a fast and cost-efficient solution for specimen and chamber decontamination. A Plasma Cleaner is used to generate reactive gas-phase radicals in a plasma. The radicals migrate into the instrument chamber and chemically react with the unwanted hydrocarbons.

• Fast specimen decontamination

The ZEISS Focal CC (Focal Charge Compensation) is an improved gas injection system to increase image quality by eliminating charging effects. Former specimen charging, particularly in samples containing large regions of bare resin resulted in a significant degradation in image quality and distortion.

By using ZEISS ECO Quiet Mode and with help from a vacuum reservoir the pre-pump is automatically switched off after reaching a factory pre-set vacuum level. The vacuum reservoir allows the system to be operated for hours without the need of the pre-pump. This results in both the reduction of noise levels and energy consumption.

An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.

With the Dual Joystick Controller and the Control Panel installed, operating becomes much more comfortable. The Dual Joystick Controller can be used for stage control and specimen navigation and the Control Panel gives you easy access to the most frequently used functions of the SEM.